infovion

제품소개
Ion Beam Source
- 진공장비
- Ion Beam Source
RF Round Ion Source

"㈜인포비온"

인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다

RF Round Ion Source

RF Round Ion Source (INFO-RF60G, INFO-RF120G, INFO-RF150G, INFO-RF200G)

1. Low-maintenance parts

2. Operation with all inert and reactive gases

3. Various size options(⌀60 ~ ⌀240)

4. Effect of pre-cleaning, chemical modification of a surface, reactive etching, oxidizing & nitriding of surface, and deposition of IBD (Ion Beam Deposition) &
IBAD (Ion Beam Assisted Deposition)

INFO-RF-60G
INFO-RF-120G

Details

카달로그 다운로드

Dimension
A	53
B	146
C	298
D	134
E	134

Connetion	Type	Size
Water	Quick Coupler	⌀ 6
Gas	VCR male	⌀ 1/4"

Type		Input	Qutput
DC Power Generator	Beam	Single Phase 220V	+ 0 ~ 5kV
DC Power Generator	Accel	Single Phase 220V	- 0 ~ 500V
RF Power Generator	Plasma Ignition	Single Phase 220V	0 ~ 600W

Detail

Dimension
A	129
B	212
C	226
D	134
E	172

Connetion	Type	Size
Water	Quick Coupler	⌀ 6
Gas	VCR male	⌀ 1/4"

Type		Input	Qutput
DC Power Generator	Beam	Single Phase 220V	+ 0 ~ 5kV
DC Power Generator	Accel	Single Phase 220V	- 0 ~ 500V
RF Power Generator	Plasma Ignition	Single Phase 220V	0 ~ 1kW