OLED Cluster System (Cluster Type)

Details

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• OLED cluster system can be applied to make a mono and full color lighting system.
  This system enables to deposit an of organic, alkali metal and metal.
  And mask exchange mechanism are available in process chamber.

  Specification

  Process module : 2 modules for organic & metal evaporator Transfer module : vacuum robot & degassing module Source : - organic 9 ea middle temp source(~ 700 ℃) in each chamber - metal source 3 ea in each chamber - max 4 materials co-deposition Deposition rate control: ≤ 0.1A/s Mask change module: 3- mask auto changer in process chamber, pin align type (±100 ㎛) Base pressure : - Process chamber ≤ 1 x 10-7 torr - Transfer chamber ≤ 1 x 10-6 torr Sample size: 100 x 100mm ~ 200 x 200mm Glove box : 2 workstation (4 port glove), O₂, H₂O ≦ 1 ppm Spin coater, Dispenser, UV curing: optional Software interfaces : HMI programing base GUI software

  Application

  PMOLED and AMOLED deposition on substrate and glass substrate. Organic material system for R&D .