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진공장비 - PVD

ARC Ion Plating System

Details

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  • Arc ion plating system is a batch system using the arc plasma deposition method. This system can be used for a wide variety of coating applications and achieves smooth & hardness surfaces while maintaining a high deposition rate.

    Specification Deposition mode : ion plating by arc evaporation
    Arc source : 8~16ea, Ø80 target sourcce
    Substrate : 8pole, 3 axis rotation turntable
    Coating area : Ø600 ~Ø1600 * 1000mm ~2500mm coating spec.
    Coating thickness : 1~10 micrometer
    Coating hardness : 1,700 ~ 4,000 (Hv 0.05)
    Coating adhesion : HF1~ HF2
    Base pressure : ≤ 1 x 10-6 torr
    Software interfaces : HMI programing base GUI software
    Application DLC coating
    LED, LD and high-speed devices
    Other general electronic devices
    Material research & development