"㈜인포비온"
인류의 미래를 새롭게 창조해 나아갈 장비, 첨단소재 업체입니다
진공장비 - PVD
IBAD System
Details
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IBAD (Ion Beam Assisted Deposition) system is designed for coating of lift-off, planetary,
satellite substrate. Evaporation system can be deposit metal and oxide on a substrate
with ion beam assisted.Specification Ion beam source: RF type ion source, source size: Ø60~Ø200
Neutralizer: RF type neutralizer (filament-less)
E-beam gun: Single crucible and multi-crucible e-beam gun
with power supplies of 6, 10,15 kW power
E-beam angle : 180° or 270°
Sample size : 4 inch single ~ 1600mm dome
Substrate type : single stage, lift-off dome, planetary dome,
satellite dome
Base pressure : ≤ 1 x 10-7 torr
Software interfaces : HMI programing base GUI software
Application Super conductor
LED, LD and high-speed devices
Optical coating
AR coating
Material research & development