Introduction

Research Institute of Display and Plasma Technology

Welcome to INFOVION research institute of display and plasma technology.
We have focused on the development of industrial technology through the expansion of R&D in areas including flexible display, semiconductor, energy,
functional and electronic materials since the establishment of the research institute of display technology in February 2004.
And we are also focusing on technological capability by successfully carrying out various national R&D projects.
Our researchers are sincerely dedicated to challenging current and pioneering the future.

Research equipment

Deposition / Beam treatment

In-line sputtering and beam treatment system / Gen.6
In-line ALD system / Gen.2
IBD (Ion beam deposition system)
Arc deposition
Sputtering
Linear beam test

Beam sources

Ion beam source (Round and Linear)
Electron beam source (Round and Linear)